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ZY-1110大(Da)弧(Hu)离(Li)子(Zi)镀(Du)膜(Mo)机(Ji)

　(?)　(?)工(Gong)具(Ju)镀(Du)/Tool Coating 标(Biao)准(Zhun)机(Ji)型(Xing)/Standard Model ZY-1110大(Da)弧(Hu)镀(Du)膜(Mo)机(Ji)

　(?)　(?)Big Arc Ion Coating Machine

　(?)　(?)设(She)备(Bei)简(Jian)述(Shu)/Equipment Brief

　(?)　(?)ZY-1110大(Da)弧(Hu)离(Li)子(Zi)镀(Du)膜(Mo)机(Ji)是(Shi)我(Wo)公(Gong)司(Si)自(Zi)主(Zhu)研(Yan)发(Fa)的(De)超(Chao)硬(Ying)膜(Mo)离(Li)子(Zi)镀(Du)膜(Mo)机(Ji)，(?)采(Cai)用(Yong)独(Du)有(You)的(De)新(Xin)型(Xing)过(Guo)滤(Lu)弧(Hu)源(Yuan)镀(Du)膜(Mo)技(Ji)术(Shu)、(?)等(Deng)离(Li)子(Zi)体(Ti)增(Zeng)强(Qiang)阳(Yang)极(Ji)辅(Fu)助(Zhu)镀(Du)膜(Mo)技(Ji)术(Shu)，(?)规(Gui)划(Hua)了(Liao)炉(Lu)体(Ti)内(Nei)等(Deng)离(Li)子(Zi)体(Ti)的(De)路(Lu)线(Xian)和(He)分(Fen)布(Bu)，(?)增(Zeng)强(Qiang)了(Liao)刻(Ke)蚀(Shi)效(Xiao)果(Guo)，(?)提(Ti)高(Gao)了(Liao)离(Li)化(Hua)率(Lu)，(?)使(Shi)得(De)靶(Ba)材(Cai)表(Biao)面(Mian)被(Bei)均(Jun)匀(Yun)刻(Ke)蚀(Shi)，(?)涂(Tu)层(Ceng)表(Biao)面(Mian)更(Geng)光(Guang)滑(Hua)致(Zhi)密(Mi)，(?)提(Ti)升(Sheng)了(Liao)涂(Tu)层(Ceng)的(De)结(Jie)合(He)力(Li)，(?)确(Que)保(Bao)了(Liao)涂(Tu)层(Ceng)厚(Hou)度(Du)及(Ji)涂(Tu)层(Ceng)的(De)均(Jun)匀(Yun)性(Xing)。(?)同(Tong)时(Shi)，(?)新(Xin)技(Ji)术(Shu)的(De)应(Ying)用(Yong)提(Ti)高(Gao)了(Liao)镀(Du)膜(Mo)效(Xiao)率(Lu)，(?)节(Jie)约(Yue)了(Liao)能(Neng)耗(Hao)和(He)运(Yun)行(Xing)成(Cheng)本(Ben)。(?)

　(?)　(?)ZY-1110 Big Arc ion vacuum coating machine is a super hard film ion coating machine, self-developed by IKS, adopted unique new filter arc source coating technology, plasma enhanced and anode assisted coating technology, the route and distribution of plasma inside of the furnace are planned, the ionization rate of the target material was enhanced, So that the surface of the target is etched uniformly, the coating surface is smooth and compact while the bonding force of the coating is optimized, ensure coating thickness and uniformity. Meanwhile, the application of new technology improves the efficiency of coating, saves energy and operation cost.

设(She)备(Bei)参(Can)数(Shu)/Equipment Parameters

炉(Lu)体(Ti)尺(Chi)寸(Cun)Chamber Size	Ф(?)1180XH1050	有(You)效(Xiao)空(Kong)间(Jian)Effective Space	Ф(?)800XH650
应(Ying)用(Yong)技(Ji)术(Shu)Applied Technology	IET+ BIG ARC	靶(Ba)材(Cai)数(Shu)量(Liang)Quantity of Target Material	IET2+ARC9 xφ(?)160
标(Biao)准(Zhun)涂(Tu)层(Ceng)Standard Coating	TiN, CrN, AlCrN, etc.	其(Qi)他(Ta)复(Fu)合(He)涂(Tu)层(Ceng)Other Composite Coating	TiAlCrN, TiSiN,TiAlCN,etc.
生(Sheng)产(Chan)周(Zhou)期(Qi)Production Cycle	4-6小(Xiao)时(Shi)/炉(Lu)4-6hours/furnace	外(Wai)围(Wei)尺(Chi)寸(Cun)Overall Dimension	L5800XW2100XH2100mm L4800XW3000XH2100
使(Shi)用(Yong)范(Fan)围(Wei)Rang of Application	适(Shi)用(Yong)于(Yu)滚(Gun)刀(Dao)，(?)钻(Zuan)头(Tou)，(?)棒(Bang)状(Zhuang)铣(Xi)刀(Dao)，(?)微(Wei)钻(Zuan)，(?)刀(Dao)粒(Li)等(Deng)。(?)Hobs，(?)drills，(?)stick milling cutter, micro-drill, cutter grain, etc

上(Shang)一(Yi)篇(Pian)：(?)暂(Zan)无(Wu)内(Nei)容(Rong)
下(Xia)一(Yi)篇(Pian)：(?)801系(Xi)列(Lie)DLC镀(Du)膜(Mo)机(Ji)

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